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edited to reflect edited question (f assumed generically finite); added 29 characters in body
Anton Geraschenko
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Since the blowups are proper and $f$ is proper, the "property P argument" shows that $\tilde f$ is proper. A proper quasi-finite morphism is finite (EGA IV 18.12.4), so $\tilde f$ is finite.

This (more or less) reduces to the case when $f$ is finite to begin with, so no blowups are needed. Then the only condition I know to ensure flatness is the one Dave Anderson cited, [Matsumura's Commutative Ring Theory, Theorem 23.1]: if $Y$ is regular and $X$ is Cohen-Macaulay, then $f$ is flat.

Anton Geraschenko
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