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Who first proved that there are Õ(n) at least n^(1-ε) primes up to n?

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Who first proved that there are Õ(n) primes up to n?

It's well-known that Hadamard and de la Vallée-Poussin independently proved the Prime Number Theorem in 1896: that $\pi(n)=n/\log n+o(n/\log n)$. I'm curious as to a weaker result: that for any $\varepsilon>0$, $\pi(n)\gg n^{1-\varepsilon}$.

Chebyshev famously proved that if $\lim \pi(n)\log n$ exists it must be equal to 1, but I seem to remember that he also proved bounds on that value, pushing the date back to 1850 or so in that case. But were there earlier results in this direction?