I thought about this question a while ago, while teaching a topics course. Since one can easily check that $${}|{\mathbb R}|=|{\mathcal P}({\mathbb N})|$$ by a direct construction that does not involve diagonalization, the question can be restated as:
Is there a proof of Cantor's theorem that ${}|X|<|{\mathcal P}(X)|$ that is not a diagonal argument?
I suspect the following works. Even if it doesn't, I believe there may be some interest in this presentation (Please let me know if you spot diagonalization somewhere).
A remark of François Dorais helped me (re)locate the argument in print. It is presented in A. Kanamori-D. Pincus. "Does GCH imply AC locally?", in Paul Erdős and his mathematics, II (Budapest, 1999), 413-426, Bolyai Soc. Math. Stud., 11, János Bolyai Math. Soc., Budapest, 2002. I believe it actually dates back to Zermelo's 1904 well-ordering paper. (I now think I learned the argument from Kanamori-Pincus, since I certainly used the paper in the topics course.)
a. There is obviously an injection $g:X\to{\mathcal P}(X)$. It is enough to show there is no surjection. Suppose there is, and call it $f$. Then $f^{-1}:{\mathcal P}^2(X)\to{\mathcal P}(X)$ is 1-1.
(If $h:A\to B$, $h^{-1}:{\mathcal P}(B)\to{\mathcal P}(A)$ is the map that to $C\subseteq B$ assigns $\{a\in A\mid h(a)\in C\}$. Since $f$ is surjective, we have that $f^{-1}$ is injective.)
(Of course, we could simply use an injection $g:{\mathcal P}(X)\to X$ and invoke Schröder-Bernstein at this point, but this route seems shorter.)
b. There is no injection $F:{\mathcal P}(Y)\to Y$ for any set $Y$. The reason is that for any $F$ we can (definably from $F$) produce a pair $(A,B)$ with $A\ne B$ and $F(A)=F(B)$. In effect, Zermelo proved that:
For any $F:{\mathcal P}(Y)\to Y$ there is a unique a unique well-ordering $(W, \lt)$ with $W\subseteq Y$ such that:
$\forall x\in W (F (\{y ∈ W \mid y \lt x\}) = x)$, and
- $F (W )\in W$.
We can then take $A=W$ and $B=\{y\in W\mid y\lt F(W)\}$.
c. Zermelo's theorem can be proved as follows: Simply notice that $W=\{a_\alpha\mid \alpha\lt \beta\}$ where $$ a_\alpha= F(\{a_\gamma\mid \gamma\lt \alpha\}) $$ and $\beta$ is largest so that this sequence is injective.
That $\beta$ exists is a consequence of Hartogs theorem that for any set $A$ there is a least ordinal $\alpha$ does not inject into $A$.
Uniqueness of $W$ is shown by considering the first place where two potential candidates for $(W, \lt)$ disagree.
d. Hartogs theorem is proved by noticing that if $\alpha$ is an ordinal and injects into $A$, then there is a subset $B$ of $A$ and a binary relation $R$ on $B$ such that $(B,R)$ is order isomorphic to $\alpha$. From this one easily sees that the collection of $\alpha$s that inject into $A$ forms a set, that is in fact an ordinal $\beta$. Then $\beta$ is least that does not inject into $A$.
Let me close with a remark, and a question: The proof above is formalizable in ZF, without choice. In fact, Zermelo's theorem is provable without using replacement, although the argument I sketched uses it.
The question is mentioned in Kanamori-Pincus: We showed that if $F:{\mathcal P}(Y)\to Y$ then $F$ is not injective by exhibiting a pair $(A,B)$ with $F(A)=F(B)$. If instead of Zermelo's argument we had used at this point the construction from the diagonal argument, we would have taken $$ A=\{y\in Y\mid \exists Z(y=F(Z)\notin Z)\}, $$ and checked that there must be a $B\ne A$ with $F(A)=F(B)$.
Can we define such $B$ from $F$?